Year	1998
Authors	SHWU-MIN HORNG
Paper Title	S. Horng;J.W. Fowler;J.K. Cochran, 1998.12, 'Using Genetic Algorithms to Manage Ion Implantation Processes in Wafer Fabrication, ' TECHCON, Semiconductor Research Corporation, pp.254.
Date of Publication	1998-12-01
ISI Number	172253